所有产品分类
SD Series
Features
Inheritance and Evolution of Process Durability
Major Products
| Model*1 | SDX600 | SDT600 | SDX1200 | SDT1200 | SDX1800 | SDT1800 | SDH3000*5 | SDH6000*5 | |
| Max. pumping speed [L/min]*2 | 10,000 | 18,000 | 19,000 | 30,000 | 50,000 | 100,000 | |||
| Ultimate pressure [Pa] *2 | 0.5 | 0.3 | 0.5 | ||||||
| N2 purge[SLM] | 0～80 | 0～120 | |||||||
| Cooling water[L/min] | 3.0 | 4.0 | 3.0 | 4.0 | 3.0 | 4.0 | 4.0 | 4.0 | |
| Power consumption[kW]*3 | 1.5 | 3.0 | 1.65 | 3.15 | 2.1 | 3.3 | 3.3 | 3.7 | |
| Dimensions [mm]*4 | L | 695 | 695 | 850 | 910 | 1050 | |||
| W | 285 | 285 | 380 | 420 | 515 | ||||
| H | 850 | 850 | 950 | 900 | 950 | ||||
*1) SDX: Energy-saving, harsh process-compatible; SDT/SDH: Super harsh and process durable
*2) Approximate data while no nitrogen purge *3) Approximate data while ultimate pressure *4) Package dimension
*5) Please contact our sales representative for more information regarding the product lineup for even greater process robustness.
Specifications and model names are subject to change without prior notice. (For information regarding compatible gases, please inquire with us.)
S-P Curve
* S-P curves vary by combination.
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