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日本Kashiyama樫山工业

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日本Kashiyama樫山工业真空泵SDL36E60/SDL3600
发布时间:2024-08-15

日本Kashiyama樫山工业真空泵SDL36E60/SDL3600


SDL Series

Available to large size wafer & FPD. Large capacity available by combination. Larger than 150kL/min also available on demand. Shorter cycle-time. Large capacity around atm. pressure can achieve high speed pumping best for large L/L chamber.

Pumps for solvent evacuation are also lined-up

Major Products

Spec. / ProductsSDL12E50SDL20E50SDL36E60SDL3600
Max. pumping speed [L/min] *125,00040,00060,00060,000
Back pump max. pumping speed [L/min] *18,0008,00010,00012,500
Ultimate pressure [Pa] *10.8
Supply voltage (50/60Hz)3Ph AC200~220V, 380~440V
Dimensions [mm] L×W×H1000×520×10501370×850×12951370×600×1295
Mass [kg]645800920950

*1) Without N2 purge.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Other pump models may be considered depending on the configuration. Please contact our sales representative for details.

S-P Curve

S-P Curve

* S-P curves vary by combination.

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