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日本Kashiyama樫山工业

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日本Kashiyama樫山工业真空泵MU100X/MU180X
发布时间:2024-08-15

日本Kashiyama樫山工业真空泵MU100X/MU180X


MU-X Series

Power Consumption 0.35kW. Extreamly Small Footprint. Roots dry pump achieved smallest energy consumption & footprint in the category. Applicable 02 for various tools. Best for clean pumping such as L/L and transfer chamber, etc.

Major Products

Spec. / ProductsMU100XMU180XMU300XMU600XMU1218XMU20N18X
Max. pumping speed
[L/min] *1
1,6603,0005,00010,00020,00030,000
Ultimate pressure
[Pa] *1
1.50.5
Supply voltage
(50/60Hz)
3Phase AC200~220V *2
Power consumption
[kW] *3
0.350.50.550.60.91.0
Dimensions [mm] L×W×H *4450×230×275550×280×299450×230×520530×230×520870×380×7511000×450×950
Mass [kg]6095100120270410

*1) Without N2 purge. *2) Contact us for other voltage options. *3) Approx. value at ultimate pressure. *4) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Contact us about large capacity pumps.

 Unit Conversion

The conversion table will convert units as you desire.

   

 

S-P Curve

S-P Curve

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